JPH0237335Y2 - - Google Patents
Info
- Publication number
- JPH0237335Y2 JPH0237335Y2 JP9570985U JP9570985U JPH0237335Y2 JP H0237335 Y2 JPH0237335 Y2 JP H0237335Y2 JP 9570985 U JP9570985 U JP 9570985U JP 9570985 U JP9570985 U JP 9570985U JP H0237335 Y2 JPH0237335 Y2 JP H0237335Y2
- Authority
- JP
- Japan
- Prior art keywords
- pure water
- water supply
- port
- air valve
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 75
- 238000004140 cleaning Methods 0.000 claims description 22
- 230000014759 maintenance of location Effects 0.000 claims description 5
- 230000002265 prevention Effects 0.000 claims description 5
- 238000009825 accumulation Methods 0.000 claims description 2
- 229910021642 ultra pure water Inorganic materials 0.000 description 6
- 239000012498 ultrapure water Substances 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- 239000008367 deionised water Substances 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 241000894006 Bacteria Species 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000003359 percent control normalization Methods 0.000 description 1
- 230000035755 proliferation Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Valve Housings (AREA)
- Multiple-Way Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9570985U JPH0237335Y2 (en]) | 1985-06-26 | 1985-06-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9570985U JPH0237335Y2 (en]) | 1985-06-26 | 1985-06-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS624667U JPS624667U (en]) | 1987-01-12 |
| JPH0237335Y2 true JPH0237335Y2 (en]) | 1990-10-09 |
Family
ID=30960573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9570985U Expired JPH0237335Y2 (en]) | 1985-06-26 | 1985-06-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0237335Y2 (en]) |
-
1985
- 1985-06-26 JP JP9570985U patent/JPH0237335Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS624667U (en]) | 1987-01-12 |
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